8/3/2012	8:57:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	8:57:18 AM	Recipe started at 8:57 AM
8/3/2012	8:57:18 AM	Helium valve closed
8/3/2012	8:57:18 AM	H2 valve closed
8/3/2012	8:57:18 AM	BCl3 valve closed
8/3/2012	8:57:18 AM	PH3 valve closed
8/3/2012	8:57:18 AM	SiCl4 pre valve closed
8/3/2012	8:57:18 AM	SiCl4 post valve closed
8/3/2012	8:57:18 AM	Main Vac valve closed
8/3/2012	8:57:18 AM	Bypass valve closed
8/3/2012	8:57:18 AM	Bubbler valve closed
8/3/2012	8:57:18 AM	Helium MFC set to  0.000000
8/3/2012	8:57:18 AM	H2 MFC set to  0.000000
8/3/2012	8:57:18 AM	BCl3 MFC set to  0.000000
8/3/2012	8:57:18 AM	PH3 MFC set to  0.000000
8/3/2012	8:57:18 AM	SiCl4 MFC set to  0.000000
8/3/2012	8:57:18 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	8:57:18 AM	Tube furnace set to 0
8/3/2012	8:57:21 AM	H2 valve closed
8/3/2012	8:57:21 AM	BCl3 valve closed
8/3/2012	8:57:21 AM	PH3 valve closed
8/3/2012	8:57:21 AM	SiCl4 pre valve closed
8/3/2012	8:57:21 AM	SiCl4 post valve closed
8/3/2012	8:57:21 AM	Main Vac valve closed
8/3/2012	8:57:21 AM	Bypass valve closed
8/3/2012	8:57:21 AM	Bubbler valve closed
8/3/2012	8:57:21 AM	Helium valve opened
8/3/2012	8:57:21 AM	Helium MFC set to  500.000000
8/3/2012	8:57:21 AM	H2 MFC set to  0.000000
8/3/2012	8:57:21 AM	BCl3 MFC set to  0.000000
8/3/2012	8:57:21 AM	PH3 MFC set to  0.000000
8/3/2012	8:57:21 AM	SiCl4 MFC set to  0.000000
8/3/2012	8:57:21 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	8:57:22 AM	Tube furnace set to 0
8/3/2012	8:58:31 AM	Helium valve closed
8/3/2012	8:58:31 AM	H2 valve closed
8/3/2012	8:58:31 AM	BCl3 valve closed
8/3/2012	8:58:31 AM	PH3 valve closed
8/3/2012	8:58:31 AM	SiCl4 pre valve closed
8/3/2012	8:58:31 AM	SiCl4 post valve closed
8/3/2012	8:58:31 AM	Main Vac valve closed
8/3/2012	8:58:31 AM	Bypass valve closed
8/3/2012	8:58:31 AM	Bubbler valve closed
8/3/2012	8:58:31 AM	Helium MFC set to  0.000000
8/3/2012	8:58:31 AM	H2 MFC set to  0.000000
8/3/2012	8:58:31 AM	BCl3 MFC set to  0.000000
8/3/2012	8:58:31 AM	PH3 MFC set to  0.000000
8/3/2012	8:58:31 AM	SiCl4 MFC set to  0.000000
8/3/2012	8:58:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	8:58:31 AM	Tube furnace set to 0
8/3/2012	8:58:32 AM	Run finished at 8:58 AM
8/3/2012	8:58:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	9:02:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	9:02:04 AM	Recipe started at 9:02 AM
8/3/2012	9:02:04 AM	Helium valve closed
8/3/2012	9:02:04 AM	H2 valve closed
8/3/2012	9:02:04 AM	BCl3 valve closed
8/3/2012	9:02:04 AM	PH3 valve closed
8/3/2012	9:02:04 AM	SiCl4 pre valve closed
8/3/2012	9:02:04 AM	SiCl4 post valve closed
8/3/2012	9:02:04 AM	Main Vac valve closed
8/3/2012	9:02:04 AM	Bubbler valve closed
8/3/2012	9:02:04 AM	Bypass valve opened
8/3/2012	9:02:04 AM	Helium MFC set to  0.000000
8/3/2012	9:02:04 AM	H2 MFC set to  0.000000
8/3/2012	9:02:04 AM	BCl3 MFC set to  0.000000
8/3/2012	9:02:04 AM	PH3 MFC set to  0.000000
8/3/2012	9:02:04 AM	SiCl4 MFC set to  0.000000
8/3/2012	9:02:04 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	9:02:04 AM	Tube furnace set to 0
8/3/2012	9:03:14 AM	Helium valve closed
8/3/2012	9:03:15 AM	H2 valve closed
8/3/2012	9:03:15 AM	BCl3 valve closed
8/3/2012	9:03:15 AM	PH3 valve closed
8/3/2012	9:03:15 AM	SiCl4 pre valve closed
8/3/2012	9:03:15 AM	SiCl4 post valve closed
8/3/2012	9:03:15 AM	Main Vac valve closed
8/3/2012	9:03:15 AM	Bubbler valve closed
8/3/2012	9:03:15 AM	Bypass valve opened
8/3/2012	9:03:15 AM	Helium MFC set to  0.000000
8/3/2012	9:03:15 AM	H2 MFC set to  0.000000
8/3/2012	9:03:15 AM	BCl3 MFC set to  0.000000
8/3/2012	9:03:15 AM	PH3 MFC set to  0.000000
8/3/2012	9:03:15 AM	SiCl4 MFC set to  0.000000
8/3/2012	9:03:15 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	9:03:15 AM	Tube furnace set to 0
8/3/2012	9:04:15 AM	Helium valve closed
8/3/2012	9:04:15 AM	H2 valve closed
8/3/2012	9:04:15 AM	BCl3 valve closed
8/3/2012	9:04:15 AM	PH3 valve closed
8/3/2012	9:04:15 AM	SiCl4 pre valve closed
8/3/2012	9:04:15 AM	SiCl4 post valve closed
8/3/2012	9:04:15 AM	Bypass valve closed
8/3/2012	9:04:15 AM	Bubbler valve closed
8/3/2012	9:04:15 AM	Main Vac valve opened
8/3/2012	9:04:15 AM	Helium MFC set to  0.000000
8/3/2012	9:04:15 AM	H2 MFC set to  0.000000
8/3/2012	9:04:15 AM	BCl3 MFC set to  0.000000
8/3/2012	9:04:15 AM	PH3 MFC set to  0.000000
8/3/2012	9:04:15 AM	SiCl4 MFC set to  0.000000
8/3/2012	9:04:15 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	9:04:15 AM	Tube furnace set to 0
8/3/2012	9:04:16 AM	Run finished at 9:04 AM
8/3/2012	9:04:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	11:14:50 AM	Main Vac valve closed
8/3/2012	11:15:04 AM	Main Vac valve opened
8/3/2012	11:18:39 AM	Recipe started at 11:18 AM
8/3/2012	11:18:39 AM	Helium valve closed
8/3/2012	11:18:39 AM	H2 valve closed
8/3/2012	11:18:39 AM	BCl3 valve closed
8/3/2012	11:18:39 AM	PH3 valve closed
8/3/2012	11:18:39 AM	SiCl4 pre valve closed
8/3/2012	11:18:39 AM	SiCl4 post valve closed
8/3/2012	11:18:39 AM	Bypass valve closed
8/3/2012	11:18:39 AM	Bubbler valve closed
8/3/2012	11:18:39 AM	Main Vac valve opened
8/3/2012	11:18:39 AM	Helium MFC set to  0.000000
8/3/2012	11:18:39 AM	H2 MFC set to  0.000000
8/3/2012	11:18:39 AM	BCl3 MFC set to  0.000000
8/3/2012	11:18:39 AM	PH3 MFC set to  0.000000
8/3/2012	11:18:39 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:18:39 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:18:39 AM	Tube furnace set to 0
8/3/2012	11:18:42 AM	Helium valve closed
8/3/2012	11:18:42 AM	H2 valve closed
8/3/2012	11:18:42 AM	BCl3 valve closed
8/3/2012	11:18:42 AM	PH3 valve closed
8/3/2012	11:18:42 AM	SiCl4 pre valve closed
8/3/2012	11:18:42 AM	SiCl4 post valve closed
8/3/2012	11:18:42 AM	Main Vac valve closed
8/3/2012	11:18:42 AM	Bypass valve closed
8/3/2012	11:18:42 AM	Bubbler valve closed
8/3/2012	11:18:42 AM	Helium MFC set to  0.000000
8/3/2012	11:18:42 AM	H2 MFC set to  0.000000
8/3/2012	11:18:42 AM	BCl3 MFC set to  0.000000
8/3/2012	11:18:42 AM	PH3 MFC set to  0.000000
8/3/2012	11:18:42 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:18:42 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:18:43 AM	Tube furnace set to 0
8/3/2012	11:18:46 AM	Helium valve closed
8/3/2012	11:18:46 AM	BCl3 valve closed
8/3/2012	11:18:46 AM	PH3 valve closed
8/3/2012	11:18:46 AM	SiCl4 pre valve closed
8/3/2012	11:18:46 AM	SiCl4 post valve closed
8/3/2012	11:18:46 AM	Main Vac valve closed
8/3/2012	11:18:46 AM	Bypass valve closed
8/3/2012	11:18:46 AM	Bubbler valve closed
8/3/2012	11:18:46 AM	H2 valve opened
8/3/2012	11:18:46 AM	Helium MFC set to  0.000000
8/3/2012	11:18:46 AM	H2 MFC set to  500.000000
8/3/2012	11:18:46 AM	BCl3 MFC set to  0.000000
8/3/2012	11:18:46 AM	PH3 MFC set to  0.000000
8/3/2012	11:18:46 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:18:46 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:18:46 AM	Tube furnace set to 0
8/3/2012	11:20:01 AM	Helium valve closed
8/3/2012	11:20:01 AM	BCl3 valve closed
8/3/2012	11:20:01 AM	PH3 valve closed
8/3/2012	11:20:01 AM	SiCl4 pre valve closed
8/3/2012	11:20:01 AM	SiCl4 post valve closed
8/3/2012	11:20:01 AM	Main Vac valve closed
8/3/2012	11:20:01 AM	Bypass valve closed
8/3/2012	11:20:01 AM	H2 valve opened
8/3/2012	11:20:01 AM	Bubbler valve opened
8/3/2012	11:20:01 AM	Helium MFC set to  0.000000
8/3/2012	11:20:01 AM	H2 MFC set to  500.000000
8/3/2012	11:20:01 AM	BCl3 MFC set to  0.000000
8/3/2012	11:20:01 AM	PH3 MFC set to  0.000000
8/3/2012	11:20:01 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:20:01 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:20:01 AM	Tube furnace set to 0
8/3/2012	11:20:02 AM	Helium valve closed
8/3/2012	11:20:02 AM	BCl3 valve closed
8/3/2012	11:20:02 AM	PH3 valve closed
8/3/2012	11:20:02 AM	SiCl4 pre valve closed
8/3/2012	11:20:02 AM	SiCl4 post valve closed
8/3/2012	11:20:02 AM	Main Vac valve closed
8/3/2012	11:20:02 AM	Bypass valve closed
8/3/2012	11:20:02 AM	H2 valve opened
8/3/2012	11:20:02 AM	Bubbler valve opened
8/3/2012	11:20:02 AM	Helium MFC set to  0.000000
8/3/2012	11:20:02 AM	H2 MFC set to  500.000000
8/3/2012	11:20:02 AM	BCl3 MFC set to  0.000000
8/3/2012	11:20:02 AM	PH3 MFC set to  0.000000
8/3/2012	11:20:02 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:20:02 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:20:03 AM	Tube furnace set to 1000
8/3/2012	11:45:03 AM	Helium valve closed
8/3/2012	11:45:03 AM	PH3 valve closed
8/3/2012	11:45:03 AM	Main Vac valve closed
8/3/2012	11:45:03 AM	Bypass valve closed
8/3/2012	11:45:03 AM	H2 valve opened
8/3/2012	11:45:03 AM	BCl3 valve opened
8/3/2012	11:45:03 AM	SiCl4 pre valve opened
8/3/2012	11:45:03 AM	SiCl4 post valve opened
8/3/2012	11:45:03 AM	Bubbler valve opened
8/3/2012	11:45:03 AM	Helium MFC set to  0.000000
8/3/2012	11:45:03 AM	H2 MFC set to  430.000000
8/3/2012	11:45:03 AM	BCl3 MFC set to  20.000000
8/3/2012	11:45:03 AM	PH3 MFC set to  0.000000
8/3/2012	11:45:03 AM	SiCl4 MFC set to  50.000000
8/3/2012	11:45:03 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:45:03 AM	Tube furnace set to 1000
8/3/2012	11:50:03 AM	Helium valve closed
8/3/2012	11:50:03 AM	BCl3 valve closed
8/3/2012	11:50:03 AM	PH3 valve closed
8/3/2012	11:50:03 AM	SiCl4 pre valve closed
8/3/2012	11:50:03 AM	SiCl4 post valve closed
8/3/2012	11:50:03 AM	Main Vac valve closed
8/3/2012	11:50:03 AM	Bypass valve closed
8/3/2012	11:50:03 AM	H2 valve opened
8/3/2012	11:50:03 AM	Bubbler valve opened
8/3/2012	11:50:03 AM	Helium MFC set to  0.000000
8/3/2012	11:50:03 AM	H2 MFC set to  500.000000
8/3/2012	11:50:03 AM	BCl3 MFC set to  0.000000
8/3/2012	11:50:03 AM	PH3 MFC set to  0.000000
8/3/2012	11:50:03 AM	SiCl4 MFC set to  0.000000
8/3/2012	11:50:03 AM	Bypass solenoid MFC set to  0.000000
8/3/2012	11:50:03 AM	Tube furnace set to 750
8/3/2012	12:05:03 PM	H2 valve closed
8/3/2012	12:05:03 PM	BCl3 valve closed
8/3/2012	12:05:03 PM	PH3 valve closed
8/3/2012	12:05:03 PM	SiCl4 pre valve closed
8/3/2012	12:05:03 PM	SiCl4 post valve closed
8/3/2012	12:05:03 PM	Main Vac valve closed
8/3/2012	12:05:03 PM	Bypass valve closed
8/3/2012	12:05:03 PM	Helium valve opened
8/3/2012	12:05:03 PM	Bubbler valve opened
8/3/2012	12:05:03 PM	Helium MFC set to  500.000000
8/3/2012	12:05:03 PM	H2 MFC set to  0.000000
8/3/2012	12:05:03 PM	BCl3 MFC set to  0.000000
8/3/2012	12:05:03 PM	PH3 MFC set to  0.000000
8/3/2012	12:05:03 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:05:03 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:05:03 PM	Tube furnace set to 0
8/3/2012	12:24:02 PM	Helium valve closed
8/3/2012	12:24:02 PM	H2 valve closed
8/3/2012	12:24:02 PM	BCl3 valve closed
8/3/2012	12:24:02 PM	PH3 valve closed
8/3/2012	12:24:02 PM	SiCl4 pre valve closed
8/3/2012	12:24:02 PM	SiCl4 post valve closed
8/3/2012	12:24:02 PM	Main Vac valve closed
8/3/2012	12:24:02 PM	Bypass valve closed
8/3/2012	12:24:02 PM	Bubbler valve closed
8/3/2012	12:24:02 PM	Helium MFC set to  0.000000
8/3/2012	12:24:02 PM	H2 MFC set to  0.000000
8/3/2012	12:24:02 PM	BCl3 MFC set to  0.000000
8/3/2012	12:24:02 PM	PH3 MFC set to  0.000000
8/3/2012	12:24:02 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:24:02 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:24:02 PM	Tube furnace set to 0
8/3/2012	12:24:06 PM	Helium valve closed
8/3/2012	12:24:06 PM	H2 valve closed
8/3/2012	12:24:06 PM	BCl3 valve closed
8/3/2012	12:24:06 PM	PH3 valve closed
8/3/2012	12:24:06 PM	SiCl4 pre valve closed
8/3/2012	12:24:06 PM	SiCl4 post valve closed
8/3/2012	12:24:06 PM	Main Vac valve closed
8/3/2012	12:24:06 PM	Bubbler valve closed
8/3/2012	12:24:06 PM	Bypass valve opened
8/3/2012	12:24:06 PM	Helium MFC set to  0.000000
8/3/2012	12:24:06 PM	H2 MFC set to  0.000000
8/3/2012	12:24:06 PM	BCl3 MFC set to  0.000000
8/3/2012	12:24:06 PM	PH3 MFC set to  0.000000
8/3/2012	12:24:06 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:24:06 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:24:06 PM	Tube furnace set to 0
8/3/2012	12:25:03 PM	Helium valve closed
8/3/2012	12:25:03 PM	H2 valve closed
8/3/2012	12:25:03 PM	BCl3 valve closed
8/3/2012	12:25:03 PM	PH3 valve closed
8/3/2012	12:25:03 PM	SiCl4 pre valve closed
8/3/2012	12:25:03 PM	SiCl4 post valve closed
8/3/2012	12:25:03 PM	Main Vac valve closed
8/3/2012	12:25:03 PM	Bubbler valve closed
8/3/2012	12:25:03 PM	Bypass valve opened
8/3/2012	12:25:03 PM	Helium MFC set to  0.000000
8/3/2012	12:25:03 PM	H2 MFC set to  0.000000
8/3/2012	12:25:03 PM	BCl3 MFC set to  0.000000
8/3/2012	12:25:03 PM	PH3 MFC set to  0.000000
8/3/2012	12:25:03 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:25:03 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:25:04 PM	Tube furnace set to 0
8/3/2012	12:26:04 PM	Helium valve closed
8/3/2012	12:26:04 PM	H2 valve closed
8/3/2012	12:26:04 PM	BCl3 valve closed
8/3/2012	12:26:04 PM	PH3 valve closed
8/3/2012	12:26:04 PM	SiCl4 pre valve closed
8/3/2012	12:26:04 PM	SiCl4 post valve closed
8/3/2012	12:26:04 PM	Bypass valve closed
8/3/2012	12:26:04 PM	Bubbler valve closed
8/3/2012	12:26:04 PM	Main Vac valve opened
8/3/2012	12:26:04 PM	Helium MFC set to  0.000000
8/3/2012	12:26:04 PM	H2 MFC set to  0.000000
8/3/2012	12:26:04 PM	BCl3 MFC set to  0.000000
8/3/2012	12:26:04 PM	PH3 MFC set to  0.000000
8/3/2012	12:26:04 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:26:04 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:26:04 PM	Tube furnace set to 0
8/3/2012	12:26:19 PM	Run finished at 12:26 PM
8/3/2012	12:27:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	12:27:33 PM	Recipe started at 12:27 PM
8/3/2012	12:27:33 PM	Helium valve closed
8/3/2012	12:27:33 PM	H2 valve closed
8/3/2012	12:27:33 PM	BCl3 valve closed
8/3/2012	12:27:33 PM	PH3 valve closed
8/3/2012	12:27:33 PM	SiCl4 pre valve closed
8/3/2012	12:27:33 PM	SiCl4 post valve closed
8/3/2012	12:27:33 PM	Main Vac valve closed
8/3/2012	12:27:33 PM	Bypass valve closed
8/3/2012	12:27:33 PM	Bubbler valve closed
8/3/2012	12:27:33 PM	Helium MFC set to  0.000000
8/3/2012	12:27:33 PM	H2 MFC set to  0.000000
8/3/2012	12:27:33 PM	BCl3 MFC set to  0.000000
8/3/2012	12:27:33 PM	PH3 MFC set to  0.000000
8/3/2012	12:27:33 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:27:33 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:27:34 PM	Tube furnace set to 0
8/3/2012	12:27:37 PM	H2 valve closed
8/3/2012	12:27:37 PM	BCl3 valve closed
8/3/2012	12:27:37 PM	PH3 valve closed
8/3/2012	12:27:37 PM	SiCl4 pre valve closed
8/3/2012	12:27:37 PM	SiCl4 post valve closed
8/3/2012	12:27:37 PM	Main Vac valve closed
8/3/2012	12:27:37 PM	Bypass valve closed
8/3/2012	12:27:37 PM	Bubbler valve closed
8/3/2012	12:27:37 PM	Helium valve opened
8/3/2012	12:27:37 PM	Helium MFC set to  500.000000
8/3/2012	12:27:37 PM	H2 MFC set to  0.000000
8/3/2012	12:27:37 PM	BCl3 MFC set to  0.000000
8/3/2012	12:27:37 PM	PH3 MFC set to  0.000000
8/3/2012	12:27:37 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:27:37 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:27:37 PM	Tube furnace set to 0
8/3/2012	12:28:46 PM	Helium valve closed
8/3/2012	12:28:46 PM	H2 valve closed
8/3/2012	12:28:46 PM	BCl3 valve closed
8/3/2012	12:28:46 PM	PH3 valve closed
8/3/2012	12:28:46 PM	SiCl4 pre valve closed
8/3/2012	12:28:46 PM	SiCl4 post valve closed
8/3/2012	12:28:46 PM	Main Vac valve closed
8/3/2012	12:28:46 PM	Bypass valve closed
8/3/2012	12:28:46 PM	Bubbler valve closed
8/3/2012	12:28:46 PM	Helium MFC set to  0.000000
8/3/2012	12:28:46 PM	H2 MFC set to  0.000000
8/3/2012	12:28:46 PM	BCl3 MFC set to  0.000000
8/3/2012	12:28:46 PM	PH3 MFC set to  0.000000
8/3/2012	12:28:46 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:28:46 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:28:46 PM	Tube furnace set to 0
8/3/2012	12:28:47 PM	Run finished at 12:28 PM
8/3/2012	12:28:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	12:31:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	12:31:24 PM	Recipe started at 12:31 PM
8/3/2012	12:31:24 PM	Helium valve closed
8/3/2012	12:31:24 PM	H2 valve closed
8/3/2012	12:31:24 PM	BCl3 valve closed
8/3/2012	12:31:24 PM	PH3 valve closed
8/3/2012	12:31:24 PM	SiCl4 pre valve closed
8/3/2012	12:31:24 PM	SiCl4 post valve closed
8/3/2012	12:31:24 PM	Main Vac valve closed
8/3/2012	12:31:24 PM	Bubbler valve closed
8/3/2012	12:31:24 PM	Bypass valve opened
8/3/2012	12:31:24 PM	Helium MFC set to  0.000000
8/3/2012	12:31:24 PM	H2 MFC set to  0.000000
8/3/2012	12:31:24 PM	BCl3 MFC set to  0.000000
8/3/2012	12:31:24 PM	PH3 MFC set to  0.000000
8/3/2012	12:31:24 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:31:24 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:31:24 PM	Tube furnace set to 0
8/3/2012	12:32:35 PM	Helium valve closed
8/3/2012	12:32:35 PM	H2 valve closed
8/3/2012	12:32:35 PM	BCl3 valve closed
8/3/2012	12:32:35 PM	PH3 valve closed
8/3/2012	12:32:35 PM	SiCl4 pre valve closed
8/3/2012	12:32:35 PM	SiCl4 post valve closed
8/3/2012	12:32:35 PM	Main Vac valve closed
8/3/2012	12:32:35 PM	Bubbler valve closed
8/3/2012	12:32:35 PM	Bypass valve opened
8/3/2012	12:32:35 PM	Helium MFC set to  0.000000
8/3/2012	12:32:35 PM	H2 MFC set to  0.000000
8/3/2012	12:32:35 PM	BCl3 MFC set to  0.000000
8/3/2012	12:32:35 PM	PH3 MFC set to  0.000000
8/3/2012	12:32:35 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:32:35 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:32:35 PM	Tube furnace set to 0
8/3/2012	12:33:35 PM	Helium valve closed
8/3/2012	12:33:35 PM	H2 valve closed
8/3/2012	12:33:35 PM	BCl3 valve closed
8/3/2012	12:33:35 PM	PH3 valve closed
8/3/2012	12:33:35 PM	SiCl4 pre valve closed
8/3/2012	12:33:35 PM	SiCl4 post valve closed
8/3/2012	12:33:35 PM	Bypass valve closed
8/3/2012	12:33:35 PM	Bubbler valve closed
8/3/2012	12:33:35 PM	Main Vac valve opened
8/3/2012	12:33:35 PM	Helium MFC set to  0.000000
8/3/2012	12:33:35 PM	H2 MFC set to  0.000000
8/3/2012	12:33:35 PM	BCl3 MFC set to  0.000000
8/3/2012	12:33:35 PM	PH3 MFC set to  0.000000
8/3/2012	12:33:35 PM	SiCl4 MFC set to  0.000000
8/3/2012	12:33:35 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	12:33:35 PM	Tube furnace set to 0
8/3/2012	12:33:36 PM	Run finished at 12:33 PM
8/3/2012	12:33:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	2:49:50 PM	Main Vac valve closed
8/3/2012	2:50:03 PM	Main Vac valve opened
8/3/2012	2:50:18 PM	Recipe started at 2:50 PM
8/3/2012	2:50:18 PM	Helium valve closed
8/3/2012	2:50:18 PM	H2 valve closed
8/3/2012	2:50:18 PM	BCl3 valve closed
8/3/2012	2:50:18 PM	PH3 valve closed
8/3/2012	2:50:18 PM	SiCl4 pre valve closed
8/3/2012	2:50:18 PM	SiCl4 post valve closed
8/3/2012	2:50:18 PM	Bypass valve closed
8/3/2012	2:50:18 PM	Bubbler valve closed
8/3/2012	2:50:18 PM	Main Vac valve opened
8/3/2012	2:50:18 PM	Helium MFC set to  0.000000
8/3/2012	2:50:18 PM	H2 MFC set to  0.000000
8/3/2012	2:50:18 PM	BCl3 MFC set to  0.000000
8/3/2012	2:50:18 PM	PH3 MFC set to  0.000000
8/3/2012	2:50:18 PM	SiCl4 MFC set to  0.000000
8/3/2012	2:50:18 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	2:50:18 PM	Tube furnace set to 0
8/3/2012	2:50:21 PM	Helium valve closed
8/3/2012	2:50:21 PM	H2 valve closed
8/3/2012	2:50:21 PM	BCl3 valve closed
8/3/2012	2:50:21 PM	PH3 valve closed
8/3/2012	2:50:21 PM	SiCl4 pre valve closed
8/3/2012	2:50:21 PM	SiCl4 post valve closed
8/3/2012	2:50:21 PM	Main Vac valve closed
8/3/2012	2:50:21 PM	Bypass valve closed
8/3/2012	2:50:21 PM	Bubbler valve closed
8/3/2012	2:50:21 PM	Helium MFC set to  0.000000
8/3/2012	2:50:21 PM	H2 MFC set to  0.000000
8/3/2012	2:50:21 PM	BCl3 MFC set to  0.000000
8/3/2012	2:50:21 PM	PH3 MFC set to  0.000000
8/3/2012	2:50:21 PM	SiCl4 MFC set to  0.000000
8/3/2012	2:50:21 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	2:50:21 PM	Tube furnace set to 0
8/3/2012	2:50:24 PM	Helium valve closed
8/3/2012	2:50:24 PM	BCl3 valve closed
8/3/2012	2:50:24 PM	PH3 valve closed
8/3/2012	2:50:24 PM	SiCl4 pre valve closed
8/3/2012	2:50:24 PM	SiCl4 post valve closed
8/3/2012	2:50:24 PM	Main Vac valve closed
8/3/2012	2:50:24 PM	Bypass valve closed
8/3/2012	2:50:24 PM	Bubbler valve closed
8/3/2012	2:50:24 PM	H2 valve opened
8/3/2012	2:50:24 PM	Helium MFC set to  0.000000
8/3/2012	2:50:24 PM	H2 MFC set to  500.000000
8/3/2012	2:50:24 PM	BCl3 MFC set to  0.000000
8/3/2012	2:50:24 PM	PH3 MFC set to  0.000000
8/3/2012	2:50:24 PM	SiCl4 MFC set to  0.000000
8/3/2012	2:50:24 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	2:50:24 PM	Tube furnace set to 0
8/3/2012	2:51:38 PM	Helium valve closed
8/3/2012	2:51:38 PM	BCl3 valve closed
8/3/2012	2:51:38 PM	PH3 valve closed
8/3/2012	2:51:38 PM	SiCl4 pre valve closed
8/3/2012	2:51:38 PM	SiCl4 post valve closed
8/3/2012	2:51:38 PM	Main Vac valve closed
8/3/2012	2:51:38 PM	Bypass valve closed
8/3/2012	2:51:38 PM	H2 valve opened
8/3/2012	2:51:38 PM	Bubbler valve opened
8/3/2012	2:51:38 PM	Helium MFC set to  0.000000
8/3/2012	2:51:38 PM	H2 MFC set to  500.000000
8/3/2012	2:51:38 PM	BCl3 MFC set to  0.000000
8/3/2012	2:51:38 PM	PH3 MFC set to  0.000000
8/3/2012	2:51:38 PM	SiCl4 MFC set to  0.000000
8/3/2012	2:51:38 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	2:51:39 PM	Tube furnace set to 0
8/3/2012	2:51:40 PM	Helium valve closed
8/3/2012	2:51:40 PM	BCl3 valve closed
8/3/2012	2:51:40 PM	PH3 valve closed
8/3/2012	2:51:40 PM	SiCl4 pre valve closed
8/3/2012	2:51:40 PM	SiCl4 post valve closed
8/3/2012	2:51:40 PM	Main Vac valve closed
8/3/2012	2:51:40 PM	Bypass valve closed
8/3/2012	2:51:40 PM	H2 valve opened
8/3/2012	2:51:40 PM	Bubbler valve opened
8/3/2012	2:51:40 PM	Helium MFC set to  0.000000
8/3/2012	2:51:40 PM	H2 MFC set to  500.000000
8/3/2012	2:51:40 PM	BCl3 MFC set to  0.000000
8/3/2012	2:51:40 PM	PH3 MFC set to  0.000000
8/3/2012	2:51:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	2:51:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	2:51:40 PM	Tube furnace set to 1000
8/3/2012	3:16:40 PM	Helium valve closed
8/3/2012	3:16:40 PM	PH3 valve closed
8/3/2012	3:16:40 PM	Main Vac valve closed
8/3/2012	3:16:40 PM	Bypass valve closed
8/3/2012	3:16:40 PM	H2 valve opened
8/3/2012	3:16:40 PM	BCl3 valve opened
8/3/2012	3:16:40 PM	SiCl4 pre valve opened
8/3/2012	3:16:40 PM	SiCl4 post valve opened
8/3/2012	3:16:40 PM	Bubbler valve opened
8/3/2012	3:16:40 PM	Helium MFC set to  0.000000
8/3/2012	3:16:40 PM	H2 MFC set to  430.000000
8/3/2012	3:16:40 PM	BCl3 MFC set to  20.000000
8/3/2012	3:16:40 PM	PH3 MFC set to  0.000000
8/3/2012	3:16:40 PM	SiCl4 MFC set to  50.000000
8/3/2012	3:16:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:16:40 PM	Tube furnace set to 1000
8/3/2012	3:21:40 PM	Helium valve closed
8/3/2012	3:21:40 PM	BCl3 valve closed
8/3/2012	3:21:40 PM	PH3 valve closed
8/3/2012	3:21:40 PM	SiCl4 pre valve closed
8/3/2012	3:21:40 PM	SiCl4 post valve closed
8/3/2012	3:21:40 PM	Main Vac valve closed
8/3/2012	3:21:40 PM	Bypass valve closed
8/3/2012	3:21:40 PM	H2 valve opened
8/3/2012	3:21:40 PM	Bubbler valve opened
8/3/2012	3:21:40 PM	Helium MFC set to  0.000000
8/3/2012	3:21:40 PM	H2 MFC set to  500.000000
8/3/2012	3:21:40 PM	BCl3 MFC set to  0.000000
8/3/2012	3:21:40 PM	PH3 MFC set to  0.000000
8/3/2012	3:21:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:21:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:21:40 PM	Tube furnace set to 750
8/3/2012	3:36:40 PM	H2 valve closed
8/3/2012	3:36:40 PM	BCl3 valve closed
8/3/2012	3:36:40 PM	PH3 valve closed
8/3/2012	3:36:40 PM	SiCl4 pre valve closed
8/3/2012	3:36:40 PM	SiCl4 post valve closed
8/3/2012	3:36:40 PM	Main Vac valve closed
8/3/2012	3:36:40 PM	Bypass valve closed
8/3/2012	3:36:40 PM	Helium valve opened
8/3/2012	3:36:40 PM	Bubbler valve opened
8/3/2012	3:36:40 PM	Helium MFC set to  500.000000
8/3/2012	3:36:40 PM	H2 MFC set to  0.000000
8/3/2012	3:36:40 PM	BCl3 MFC set to  0.000000
8/3/2012	3:36:40 PM	PH3 MFC set to  0.000000
8/3/2012	3:36:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:36:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:36:41 PM	Tube furnace set to 0
8/3/2012	3:56:40 PM	Helium valve closed
8/3/2012	3:56:40 PM	H2 valve closed
8/3/2012	3:56:40 PM	BCl3 valve closed
8/3/2012	3:56:40 PM	PH3 valve closed
8/3/2012	3:56:40 PM	SiCl4 pre valve closed
8/3/2012	3:56:40 PM	SiCl4 post valve closed
8/3/2012	3:56:40 PM	Main Vac valve closed
8/3/2012	3:56:40 PM	Bypass valve closed
8/3/2012	3:56:41 PM	Bubbler valve closed
8/3/2012	3:56:41 PM	Helium MFC set to  0.000000
8/3/2012	3:56:41 PM	H2 MFC set to  0.000000
8/3/2012	3:56:41 PM	BCl3 MFC set to  0.000000
8/3/2012	3:56:41 PM	PH3 MFC set to  0.000000
8/3/2012	3:56:41 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:56:41 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:56:41 PM	Tube furnace set to 0
8/3/2012	3:57:17 PM	Helium valve closed
8/3/2012	3:57:17 PM	H2 valve closed
8/3/2012	3:57:17 PM	BCl3 valve closed
8/3/2012	3:57:17 PM	PH3 valve closed
8/3/2012	3:57:17 PM	SiCl4 pre valve closed
8/3/2012	3:57:17 PM	SiCl4 post valve closed
8/3/2012	3:57:17 PM	Main Vac valve closed
8/3/2012	3:57:17 PM	Bubbler valve closed
8/3/2012	3:57:17 PM	Bypass valve opened
8/3/2012	3:57:17 PM	Helium MFC set to  0.000000
8/3/2012	3:57:17 PM	H2 MFC set to  0.000000
8/3/2012	3:57:17 PM	BCl3 MFC set to  0.000000
8/3/2012	3:57:17 PM	PH3 MFC set to  0.000000
8/3/2012	3:57:17 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:57:17 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:57:17 PM	Tube furnace set to 0
8/3/2012	3:58:15 PM	Helium valve closed
8/3/2012	3:58:15 PM	H2 valve closed
8/3/2012	3:58:15 PM	BCl3 valve closed
8/3/2012	3:58:15 PM	PH3 valve closed
8/3/2012	3:58:15 PM	SiCl4 pre valve closed
8/3/2012	3:58:15 PM	SiCl4 post valve closed
8/3/2012	3:58:15 PM	Main Vac valve closed
8/3/2012	3:58:15 PM	Bubbler valve closed
8/3/2012	3:58:15 PM	Bypass valve opened
8/3/2012	3:58:15 PM	Helium MFC set to  0.000000
8/3/2012	3:58:15 PM	H2 MFC set to  0.000000
8/3/2012	3:58:15 PM	BCl3 MFC set to  0.000000
8/3/2012	3:58:15 PM	PH3 MFC set to  0.000000
8/3/2012	3:58:15 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:58:15 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:58:15 PM	Tube furnace set to 0
8/3/2012	3:59:15 PM	Helium valve closed
8/3/2012	3:59:15 PM	H2 valve closed
8/3/2012	3:59:15 PM	BCl3 valve closed
8/3/2012	3:59:15 PM	PH3 valve closed
8/3/2012	3:59:15 PM	SiCl4 pre valve closed
8/3/2012	3:59:15 PM	SiCl4 post valve closed
8/3/2012	3:59:15 PM	Bypass valve closed
8/3/2012	3:59:15 PM	Bubbler valve closed
8/3/2012	3:59:15 PM	Main Vac valve opened
8/3/2012	3:59:15 PM	Helium MFC set to  0.000000
8/3/2012	3:59:15 PM	H2 MFC set to  0.000000
8/3/2012	3:59:15 PM	BCl3 MFC set to  0.000000
8/3/2012	3:59:15 PM	PH3 MFC set to  0.000000
8/3/2012	3:59:15 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:59:15 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:59:15 PM	Tube furnace set to 0
8/3/2012	3:59:30 PM	Run finished at 3:59 PM
8/3/2012	3:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	3:59:34 PM	Recipe started at 3:59 PM
8/3/2012	3:59:34 PM	Helium valve closed
8/3/2012	3:59:34 PM	H2 valve closed
8/3/2012	3:59:34 PM	BCl3 valve closed
8/3/2012	3:59:34 PM	PH3 valve closed
8/3/2012	3:59:34 PM	SiCl4 pre valve closed
8/3/2012	3:59:34 PM	SiCl4 post valve closed
8/3/2012	3:59:34 PM	Main Vac valve closed
8/3/2012	3:59:34 PM	Bypass valve closed
8/3/2012	3:59:34 PM	Bubbler valve closed
8/3/2012	3:59:34 PM	Helium MFC set to  0.000000
8/3/2012	3:59:34 PM	H2 MFC set to  0.000000
8/3/2012	3:59:34 PM	BCl3 MFC set to  0.000000
8/3/2012	3:59:34 PM	PH3 MFC set to  0.000000
8/3/2012	3:59:34 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:59:34 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:59:34 PM	Tube furnace set to 0
8/3/2012	3:59:37 PM	H2 valve closed
8/3/2012	3:59:37 PM	BCl3 valve closed
8/3/2012	3:59:37 PM	PH3 valve closed
8/3/2012	3:59:37 PM	SiCl4 pre valve closed
8/3/2012	3:59:37 PM	SiCl4 post valve closed
8/3/2012	3:59:37 PM	Main Vac valve closed
8/3/2012	3:59:37 PM	Bypass valve closed
8/3/2012	3:59:37 PM	Bubbler valve closed
8/3/2012	3:59:37 PM	Helium valve opened
8/3/2012	3:59:37 PM	Helium MFC set to  500.000000
8/3/2012	3:59:37 PM	H2 MFC set to  0.000000
8/3/2012	3:59:37 PM	BCl3 MFC set to  0.000000
8/3/2012	3:59:37 PM	PH3 MFC set to  0.000000
8/3/2012	3:59:37 PM	SiCl4 MFC set to  0.000000
8/3/2012	3:59:37 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	3:59:37 PM	Tube furnace set to 0
8/3/2012	4:00:47 PM	Helium valve closed
8/3/2012	4:00:47 PM	H2 valve closed
8/3/2012	4:00:47 PM	BCl3 valve closed
8/3/2012	4:00:47 PM	PH3 valve closed
8/3/2012	4:00:47 PM	SiCl4 pre valve closed
8/3/2012	4:00:47 PM	SiCl4 post valve closed
8/3/2012	4:00:47 PM	Main Vac valve closed
8/3/2012	4:00:47 PM	Bypass valve closed
8/3/2012	4:00:47 PM	Bubbler valve closed
8/3/2012	4:00:47 PM	Helium MFC set to  0.000000
8/3/2012	4:00:47 PM	H2 MFC set to  0.000000
8/3/2012	4:00:47 PM	BCl3 MFC set to  0.000000
8/3/2012	4:00:47 PM	PH3 MFC set to  0.000000
8/3/2012	4:00:47 PM	SiCl4 MFC set to  0.000000
8/3/2012	4:00:47 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	4:00:47 PM	Tube furnace set to 0
8/3/2012	4:00:48 PM	Run finished at 4:00 PM
8/3/2012	4:00:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	4:04:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	4:04:26 PM	Recipe started at 4:04 PM
8/3/2012	4:04:26 PM	Helium valve closed
8/3/2012	4:04:26 PM	H2 valve closed
8/3/2012	4:04:26 PM	BCl3 valve closed
8/3/2012	4:04:26 PM	PH3 valve closed
8/3/2012	4:04:26 PM	SiCl4 pre valve closed
8/3/2012	4:04:26 PM	SiCl4 post valve closed
8/3/2012	4:04:26 PM	Main Vac valve closed
8/3/2012	4:04:26 PM	Bubbler valve closed
8/3/2012	4:04:26 PM	Bypass valve opened
8/3/2012	4:04:26 PM	Helium MFC set to  0.000000
8/3/2012	4:04:26 PM	H2 MFC set to  0.000000
8/3/2012	4:04:26 PM	BCl3 MFC set to  0.000000
8/3/2012	4:04:26 PM	PH3 MFC set to  0.000000
8/3/2012	4:04:26 PM	SiCl4 MFC set to  0.000000
8/3/2012	4:04:26 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	4:04:26 PM	Tube furnace set to 0
8/3/2012	4:05:40 PM	Helium valve closed
8/3/2012	4:05:40 PM	H2 valve closed
8/3/2012	4:05:40 PM	BCl3 valve closed
8/3/2012	4:05:40 PM	PH3 valve closed
8/3/2012	4:05:40 PM	SiCl4 pre valve closed
8/3/2012	4:05:40 PM	SiCl4 post valve closed
8/3/2012	4:05:40 PM	Main Vac valve closed
8/3/2012	4:05:40 PM	Bubbler valve closed
8/3/2012	4:05:40 PM	Bypass valve opened
8/3/2012	4:05:40 PM	Helium MFC set to  0.000000
8/3/2012	4:05:40 PM	H2 MFC set to  0.000000
8/3/2012	4:05:40 PM	BCl3 MFC set to  0.000000
8/3/2012	4:05:40 PM	PH3 MFC set to  0.000000
8/3/2012	4:05:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	4:05:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	4:05:40 PM	Tube furnace set to 0
8/3/2012	4:06:40 PM	Helium valve closed
8/3/2012	4:06:40 PM	H2 valve closed
8/3/2012	4:06:40 PM	BCl3 valve closed
8/3/2012	4:06:40 PM	PH3 valve closed
8/3/2012	4:06:40 PM	SiCl4 pre valve closed
8/3/2012	4:06:40 PM	SiCl4 post valve closed
8/3/2012	4:06:40 PM	Bypass valve closed
8/3/2012	4:06:40 PM	Bubbler valve closed
8/3/2012	4:06:40 PM	Main Vac valve opened
8/3/2012	4:06:40 PM	Helium MFC set to  0.000000
8/3/2012	4:06:40 PM	H2 MFC set to  0.000000
8/3/2012	4:06:40 PM	BCl3 MFC set to  0.000000
8/3/2012	4:06:40 PM	PH3 MFC set to  0.000000
8/3/2012	4:06:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	4:06:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	4:06:40 PM	Tube furnace set to 0
8/3/2012	4:06:41 PM	Run finished at 4:06 PM
8/3/2012	4:06:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	5:03:02 PM	Main Vac valve closed
8/3/2012	5:03:14 PM	Main Vac valve opened
8/3/2012	5:13:48 PM	Main Vac valve closed
8/3/2012	5:14:01 PM	Main Vac valve opened
8/3/2012	5:20:25 PM	Main Vac valve closed
8/3/2012	5:20:38 PM	Main Vac valve opened
8/3/2012	5:22:14 PM	Recipe started at 5:22 PM
8/3/2012	5:22:14 PM	Helium valve closed
8/3/2012	5:22:14 PM	H2 valve closed
8/3/2012	5:22:14 PM	BCl3 valve closed
8/3/2012	5:22:14 PM	PH3 valve closed
8/3/2012	5:22:14 PM	SiCl4 pre valve closed
8/3/2012	5:22:14 PM	SiCl4 post valve closed
8/3/2012	5:22:14 PM	Bypass valve closed
8/3/2012	5:22:14 PM	Bubbler valve closed
8/3/2012	5:22:14 PM	Main Vac valve opened
8/3/2012	5:22:14 PM	Helium MFC set to  0.000000
8/3/2012	5:22:14 PM	H2 MFC set to  0.000000
8/3/2012	5:22:14 PM	BCl3 MFC set to  0.000000
8/3/2012	5:22:14 PM	PH3 MFC set to  0.000000
8/3/2012	5:22:14 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:22:14 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:22:15 PM	Tube furnace set to 0
8/3/2012	5:22:18 PM	Helium valve closed
8/3/2012	5:22:18 PM	H2 valve closed
8/3/2012	5:22:18 PM	BCl3 valve closed
8/3/2012	5:22:18 PM	PH3 valve closed
8/3/2012	5:22:18 PM	SiCl4 pre valve closed
8/3/2012	5:22:18 PM	SiCl4 post valve closed
8/3/2012	5:22:18 PM	Main Vac valve closed
8/3/2012	5:22:18 PM	Bypass valve closed
8/3/2012	5:22:18 PM	Bubbler valve closed
8/3/2012	5:22:18 PM	Helium MFC set to  0.000000
8/3/2012	5:22:18 PM	H2 MFC set to  0.000000
8/3/2012	5:22:18 PM	BCl3 MFC set to  0.000000
8/3/2012	5:22:18 PM	PH3 MFC set to  0.000000
8/3/2012	5:22:18 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:22:18 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:22:18 PM	Tube furnace set to 0
8/3/2012	5:22:21 PM	Helium valve closed
8/3/2012	5:22:21 PM	BCl3 valve closed
8/3/2012	5:22:21 PM	PH3 valve closed
8/3/2012	5:22:21 PM	SiCl4 pre valve closed
8/3/2012	5:22:21 PM	SiCl4 post valve closed
8/3/2012	5:22:21 PM	Main Vac valve closed
8/3/2012	5:22:21 PM	Bypass valve closed
8/3/2012	5:22:21 PM	Bubbler valve closed
8/3/2012	5:22:21 PM	H2 valve opened
8/3/2012	5:22:21 PM	Helium MFC set to  0.000000
8/3/2012	5:22:21 PM	H2 MFC set to  500.000000
8/3/2012	5:22:21 PM	BCl3 MFC set to  0.000000
8/3/2012	5:22:21 PM	PH3 MFC set to  0.000000
8/3/2012	5:22:21 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:22:21 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:22:21 PM	Tube furnace set to 0
8/3/2012	5:23:34 PM	Helium valve closed
8/3/2012	5:23:34 PM	BCl3 valve closed
8/3/2012	5:23:34 PM	PH3 valve closed
8/3/2012	5:23:34 PM	SiCl4 pre valve closed
8/3/2012	5:23:34 PM	SiCl4 post valve closed
8/3/2012	5:23:34 PM	Main Vac valve closed
8/3/2012	5:23:34 PM	Bypass valve closed
8/3/2012	5:23:34 PM	H2 valve opened
8/3/2012	5:23:34 PM	Bubbler valve opened
8/3/2012	5:23:34 PM	Helium MFC set to  0.000000
8/3/2012	5:23:34 PM	H2 MFC set to  500.000000
8/3/2012	5:23:34 PM	BCl3 MFC set to  0.000000
8/3/2012	5:23:34 PM	PH3 MFC set to  0.000000
8/3/2012	5:23:34 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:23:34 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:23:34 PM	Tube furnace set to 0
8/3/2012	5:23:35 PM	Helium valve closed
8/3/2012	5:23:35 PM	BCl3 valve closed
8/3/2012	5:23:35 PM	PH3 valve closed
8/3/2012	5:23:35 PM	SiCl4 pre valve closed
8/3/2012	5:23:35 PM	SiCl4 post valve closed
8/3/2012	5:23:35 PM	Main Vac valve closed
8/3/2012	5:23:35 PM	Bypass valve closed
8/3/2012	5:23:35 PM	H2 valve opened
8/3/2012	5:23:35 PM	Bubbler valve opened
8/3/2012	5:23:35 PM	Helium MFC set to  0.000000
8/3/2012	5:23:35 PM	H2 MFC set to  500.000000
8/3/2012	5:23:35 PM	BCl3 MFC set to  0.000000
8/3/2012	5:23:35 PM	PH3 MFC set to  0.000000
8/3/2012	5:23:35 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:23:35 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:23:36 PM	Tube furnace set to 1000
8/3/2012	5:48:36 PM	Helium valve closed
8/3/2012	5:48:36 PM	PH3 valve closed
8/3/2012	5:48:36 PM	Main Vac valve closed
8/3/2012	5:48:36 PM	Bypass valve closed
8/3/2012	5:48:36 PM	H2 valve opened
8/3/2012	5:48:36 PM	BCl3 valve opened
8/3/2012	5:48:36 PM	SiCl4 pre valve opened
8/3/2012	5:48:36 PM	SiCl4 post valve opened
8/3/2012	5:48:36 PM	Bubbler valve opened
8/3/2012	5:48:36 PM	Helium MFC set to  0.000000
8/3/2012	5:48:36 PM	H2 MFC set to  430.000000
8/3/2012	5:48:36 PM	BCl3 MFC set to  20.000000
8/3/2012	5:48:36 PM	PH3 MFC set to  0.000000
8/3/2012	5:48:36 PM	SiCl4 MFC set to  50.000000
8/3/2012	5:48:36 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:48:36 PM	Tube furnace set to 1000
8/3/2012	5:53:36 PM	Helium valve closed
8/3/2012	5:53:36 PM	BCl3 valve closed
8/3/2012	5:53:36 PM	PH3 valve closed
8/3/2012	5:53:36 PM	SiCl4 pre valve closed
8/3/2012	5:53:36 PM	SiCl4 post valve closed
8/3/2012	5:53:36 PM	Main Vac valve closed
8/3/2012	5:53:36 PM	Bypass valve closed
8/3/2012	5:53:36 PM	H2 valve opened
8/3/2012	5:53:36 PM	Bubbler valve opened
8/3/2012	5:53:36 PM	Helium MFC set to  0.000000
8/3/2012	5:53:36 PM	H2 MFC set to  500.000000
8/3/2012	5:53:36 PM	BCl3 MFC set to  0.000000
8/3/2012	5:53:36 PM	PH3 MFC set to  0.000000
8/3/2012	5:53:36 PM	SiCl4 MFC set to  0.000000
8/3/2012	5:53:36 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	5:53:36 PM	Tube furnace set to 750
8/3/2012	6:08:36 PM	H2 valve closed
8/3/2012	6:08:36 PM	BCl3 valve closed
8/3/2012	6:08:36 PM	PH3 valve closed
8/3/2012	6:08:36 PM	SiCl4 pre valve closed
8/3/2012	6:08:36 PM	SiCl4 post valve closed
8/3/2012	6:08:36 PM	Main Vac valve closed
8/3/2012	6:08:36 PM	Bypass valve closed
8/3/2012	6:08:36 PM	Helium valve opened
8/3/2012	6:08:36 PM	Bubbler valve opened
8/3/2012	6:08:36 PM	Helium MFC set to  500.000000
8/3/2012	6:08:36 PM	H2 MFC set to  0.000000
8/3/2012	6:08:36 PM	BCl3 MFC set to  0.000000
8/3/2012	6:08:36 PM	PH3 MFC set to  0.000000
8/3/2012	6:08:36 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:08:36 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:08:36 PM	Tube furnace set to 0
8/3/2012	6:28:36 PM	Helium valve closed
8/3/2012	6:28:36 PM	H2 valve closed
8/3/2012	6:28:36 PM	BCl3 valve closed
8/3/2012	6:28:36 PM	PH3 valve closed
8/3/2012	6:28:36 PM	SiCl4 pre valve closed
8/3/2012	6:28:36 PM	SiCl4 post valve closed
8/3/2012	6:28:36 PM	Main Vac valve closed
8/3/2012	6:28:36 PM	Bypass valve closed
8/3/2012	6:28:36 PM	Bubbler valve closed
8/3/2012	6:28:36 PM	Helium MFC set to  0.000000
8/3/2012	6:28:36 PM	H2 MFC set to  0.000000
8/3/2012	6:28:36 PM	BCl3 MFC set to  0.000000
8/3/2012	6:28:36 PM	PH3 MFC set to  0.000000
8/3/2012	6:28:36 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:28:36 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:28:36 PM	Tube furnace set to 0
8/3/2012	6:31:50 PM	Helium valve closed
8/3/2012	6:31:50 PM	H2 valve closed
8/3/2012	6:31:50 PM	BCl3 valve closed
8/3/2012	6:31:50 PM	PH3 valve closed
8/3/2012	6:31:51 PM	SiCl4 pre valve closed
8/3/2012	6:31:51 PM	SiCl4 post valve closed
8/3/2012	6:31:51 PM	Main Vac valve closed
8/3/2012	6:31:51 PM	Bubbler valve closed
8/3/2012	6:31:51 PM	Bypass valve opened
8/3/2012	6:31:51 PM	Helium MFC set to  0.000000
8/3/2012	6:31:51 PM	H2 MFC set to  0.000000
8/3/2012	6:31:51 PM	BCl3 MFC set to  0.000000
8/3/2012	6:31:51 PM	PH3 MFC set to  0.000000
8/3/2012	6:31:51 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:31:51 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:31:51 PM	Tube furnace set to 0
8/3/2012	6:32:50 PM	Helium valve closed
8/3/2012	6:32:50 PM	H2 valve closed
8/3/2012	6:32:50 PM	BCl3 valve closed
8/3/2012	6:32:50 PM	PH3 valve closed
8/3/2012	6:32:50 PM	SiCl4 pre valve closed
8/3/2012	6:32:50 PM	SiCl4 post valve closed
8/3/2012	6:32:50 PM	Main Vac valve closed
8/3/2012	6:32:50 PM	Bubbler valve closed
8/3/2012	6:32:50 PM	Bypass valve opened
8/3/2012	6:32:50 PM	Helium MFC set to  0.000000
8/3/2012	6:32:50 PM	H2 MFC set to  0.000000
8/3/2012	6:32:50 PM	BCl3 MFC set to  0.000000
8/3/2012	6:32:50 PM	PH3 MFC set to  0.000000
8/3/2012	6:32:50 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:32:50 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:32:50 PM	Tube furnace set to 0
8/3/2012	6:33:50 PM	Helium valve closed
8/3/2012	6:33:50 PM	H2 valve closed
8/3/2012	6:33:50 PM	BCl3 valve closed
8/3/2012	6:33:50 PM	PH3 valve closed
8/3/2012	6:33:50 PM	SiCl4 pre valve closed
8/3/2012	6:33:50 PM	SiCl4 post valve closed
8/3/2012	6:33:50 PM	Bypass valve closed
8/3/2012	6:33:50 PM	Bubbler valve closed
8/3/2012	6:33:50 PM	Main Vac valve opened
8/3/2012	6:33:50 PM	Helium MFC set to  0.000000
8/3/2012	6:33:50 PM	H2 MFC set to  0.000000
8/3/2012	6:33:50 PM	BCl3 MFC set to  0.000000
8/3/2012	6:33:50 PM	PH3 MFC set to  0.000000
8/3/2012	6:33:50 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:33:50 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:33:50 PM	Tube furnace set to 0
8/3/2012	6:34:32 PM	Run finished at 6:34 PM
8/3/2012	6:34:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	6:34:36 PM	Recipe started at 6:34 PM
8/3/2012	6:34:36 PM	Helium valve closed
8/3/2012	6:34:36 PM	H2 valve closed
8/3/2012	6:34:36 PM	BCl3 valve closed
8/3/2012	6:34:36 PM	PH3 valve closed
8/3/2012	6:34:36 PM	SiCl4 pre valve closed
8/3/2012	6:34:36 PM	SiCl4 post valve closed
8/3/2012	6:34:36 PM	Main Vac valve closed
8/3/2012	6:34:36 PM	Bypass valve closed
8/3/2012	6:34:36 PM	Bubbler valve closed
8/3/2012	6:34:36 PM	Helium MFC set to  0.000000
8/3/2012	6:34:36 PM	H2 MFC set to  0.000000
8/3/2012	6:34:36 PM	BCl3 MFC set to  0.000000
8/3/2012	6:34:36 PM	PH3 MFC set to  0.000000
8/3/2012	6:34:36 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:34:36 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:34:36 PM	Tube furnace set to 0
8/3/2012	6:34:39 PM	H2 valve closed
8/3/2012	6:34:39 PM	BCl3 valve closed
8/3/2012	6:34:39 PM	PH3 valve closed
8/3/2012	6:34:39 PM	SiCl4 pre valve closed
8/3/2012	6:34:39 PM	SiCl4 post valve closed
8/3/2012	6:34:39 PM	Main Vac valve closed
8/3/2012	6:34:39 PM	Bypass valve closed
8/3/2012	6:34:39 PM	Bubbler valve closed
8/3/2012	6:34:39 PM	Helium valve opened
8/3/2012	6:34:39 PM	Helium MFC set to  500.000000
8/3/2012	6:34:39 PM	H2 MFC set to  0.000000
8/3/2012	6:34:39 PM	BCl3 MFC set to  0.000000
8/3/2012	6:34:39 PM	PH3 MFC set to  0.000000
8/3/2012	6:34:39 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:34:39 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:34:39 PM	Tube furnace set to 0
8/3/2012	6:35:49 PM	Helium valve closed
8/3/2012	6:35:49 PM	H2 valve closed
8/3/2012	6:35:49 PM	BCl3 valve closed
8/3/2012	6:35:49 PM	PH3 valve closed
8/3/2012	6:35:49 PM	SiCl4 pre valve closed
8/3/2012	6:35:49 PM	SiCl4 post valve closed
8/3/2012	6:35:49 PM	Main Vac valve closed
8/3/2012	6:35:49 PM	Bypass valve closed
8/3/2012	6:35:49 PM	Bubbler valve closed
8/3/2012	6:35:49 PM	Helium MFC set to  0.000000
8/3/2012	6:35:49 PM	H2 MFC set to  0.000000
8/3/2012	6:35:49 PM	BCl3 MFC set to  0.000000
8/3/2012	6:35:49 PM	PH3 MFC set to  0.000000
8/3/2012	6:35:49 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:35:49 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:35:49 PM	Tube furnace set to 0
8/3/2012	6:35:50 PM	Run finished at 6:35 PM
8/3/2012	6:35:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2012	6:37:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2012	6:37:40 PM	Recipe started at 6:37 PM
8/3/2012	6:37:40 PM	Helium valve closed
8/3/2012	6:37:40 PM	H2 valve closed
8/3/2012	6:37:40 PM	BCl3 valve closed
8/3/2012	6:37:40 PM	PH3 valve closed
8/3/2012	6:37:40 PM	SiCl4 pre valve closed
8/3/2012	6:37:40 PM	SiCl4 post valve closed
8/3/2012	6:37:40 PM	Main Vac valve closed
8/3/2012	6:37:40 PM	Bubbler valve closed
8/3/2012	6:37:40 PM	Bypass valve opened
8/3/2012	6:37:40 PM	Helium MFC set to  0.000000
8/3/2012	6:37:40 PM	H2 MFC set to  0.000000
8/3/2012	6:37:40 PM	BCl3 MFC set to  0.000000
8/3/2012	6:37:40 PM	PH3 MFC set to  0.000000
8/3/2012	6:37:40 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:37:40 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:37:40 PM	Tube furnace set to 0
8/3/2012	6:38:50 PM	Helium valve closed
8/3/2012	6:38:50 PM	H2 valve closed
8/3/2012	6:38:50 PM	BCl3 valve closed
8/3/2012	6:38:50 PM	PH3 valve closed
8/3/2012	6:38:50 PM	SiCl4 pre valve closed
8/3/2012	6:38:50 PM	SiCl4 post valve closed
8/3/2012	6:38:50 PM	Main Vac valve closed
8/3/2012	6:38:50 PM	Bubbler valve closed
8/3/2012	6:38:50 PM	Bypass valve opened
8/3/2012	6:38:50 PM	Helium MFC set to  0.000000
8/3/2012	6:38:50 PM	H2 MFC set to  0.000000
8/3/2012	6:38:50 PM	BCl3 MFC set to  0.000000
8/3/2012	6:38:51 PM	PH3 MFC set to  0.000000
8/3/2012	6:38:51 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:38:51 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:38:51 PM	Tube furnace set to 0
8/3/2012	6:39:51 PM	Helium valve closed
8/3/2012	6:39:51 PM	H2 valve closed
8/3/2012	6:39:51 PM	BCl3 valve closed
8/3/2012	6:39:51 PM	PH3 valve closed
8/3/2012	6:39:51 PM	SiCl4 pre valve closed
8/3/2012	6:39:51 PM	SiCl4 post valve closed
8/3/2012	6:39:51 PM	Bypass valve closed
8/3/2012	6:39:51 PM	Bubbler valve closed
8/3/2012	6:39:51 PM	Main Vac valve opened
8/3/2012	6:39:51 PM	Helium MFC set to  0.000000
8/3/2012	6:39:51 PM	H2 MFC set to  0.000000
8/3/2012	6:39:51 PM	BCl3 MFC set to  0.000000
8/3/2012	6:39:51 PM	PH3 MFC set to  0.000000
8/3/2012	6:39:51 PM	SiCl4 MFC set to  0.000000
8/3/2012	6:39:51 PM	Bypass solenoid MFC set to  0.000000
8/3/2012	6:39:51 PM	Tube furnace set to 0
8/3/2012	6:39:52 PM	Run finished at 6:39 PM
8/3/2012	6:39:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
